基于DSP的离焦信号同步采集与处理技术研究-仪器科学与技术专业论文.docxVIP

哈尔滨工业大学工学硕士学位论文 哈尔滨工业大学工学硕士学位论文 - - I - 摘 要 激光直写机是制作衍射光学元件的关键设备，离焦检测技术是其中的重 要单元技术之一。离焦检测系统为聚焦伺服系统提供聚焦误差信号，使写入 光斑经过伺服控制后能够精确聚焦于光刻胶表面，从而保证刻蚀质量。 本文基于差动像散法对激光直写系统中的离焦信号进行检测，针对原有 采集系统存在的信号采集同步性差、实时性低的问题，提出了基于 DSP 的同 步信号采集技术，由 DSP 控制 CPLD 同时触发四路 AD 采集信号，得到聚焦 误差信号与离焦量的对应关系，实现离焦误差信号的多路同步、实时、高精 度采集。 本文基于 TMS320LF2407A 芯片实现了采集电路的软硬件设计。采集电 路系统由 DSP、CPLD、光电信号转换和放大、AD 转换器、存储器和 DA 转 换器等部分组成。重点介绍了采集电路的硬件设计和软件的实现，给出了相 应的硬件原理图和软件流程图。 在以上研究工作的基础上，搭建了光学实验平台并进行了实验测试，测 试结果表明，该采集系统消除了激光光强不稳定等因素对聚焦误差信号的影 响，提高了系统检测精度。 关键词 激光直写；离焦检测；同步采集；聚焦误差信号 - - II - Abstract The laser direct writing system is the key equipment used for making diffractive optical elements. The defocus detection system provides the focus error signal (FES) for the focus-servo system, which makes the writing spot precisely focusing on the resist. Therefore, the etching quality can be ensured. The defocusing detecting technique based on differential astigmatic method is selected to satisfy the defocus detection system. The defocus signal detection of laser direct writing system is established based on the differential astigmatism. Due to the former acquisition system has poor synchronization and real-time problem, a method of the DSP-based synchronous data acquisition is presented. The DSP control CPLD trigger four AD at the same time, then the relationship between defocus signal and output signals is given. Thus realizes the synchronous multi-channel, real time, high-precision data acquisition. The acquisition circuit is based on TMS320LF2407A chip to achieve software and hardware design. It was composed by the DSP, CPLD, photoelectric conversion and signal amplification, AD converters, memory and DA converter and other components. Focus on the hardware and software design of the acquisition circuit, the corresponding principle of hardware and software flow chart is given. According to these research works, the system was established. Experimental results show the influence by the instability of laser power can be elimi