介孔ZnO材料的制备及气敏性能的研究-材料物理与化学专业论文.docxVIP

万方数据 万方数据 摘 要 ZnO 气敏传感器以其响应速度快、恢复时间短、选择性好及对环境污染 小等特点成为气敏传感器领域研究的热点，引起人们的广泛关注。其中， ZnO 薄膜表面的孔结构，对于气体的检测有着极大的优化作用。 本文主要利用溶胶-凝胶法，以醋酸锌（Zn(CH3COO)2·2H2O）为原料， 聚乙二醇 PEG 为模板剂，合成了具有孔结构的 ZnO 薄膜，考察了各种工艺 参数对 ZnO 薄膜的微观结构、表面形貌及其气敏性能的影响，从而得到了 以下一些结果： 1．络合剂的加入可以有效地抑制 Zn(CH3COO)2·2H2O 强烈水解，由二 乙醇胺（DEA）做络合剂所得溶胶合成的 ZnO 薄膜具有较好的孔结构；醋 酸锌浓度及 PEG 的加入量对 ZnO 晶粒尺寸影响不明显；煅烧时间比煅烧温 度对晶粒尺寸的影响大；ZnO 晶粒尺寸随水浴温度的升高而增大，增幅不明 显。 2．具有孔结构的 ZnO 薄膜，其孔径大小随醋酸锌浓度的增大而增大， 孔密度先增大后减小；低分子量薄膜孔径小，且孔密度较高；孔径随 PEG 加入量的增大而增大；500 ℃时，薄膜的表面疏松多孔，孔密度较大；70 ℃ 的水浴有利孔结构的形成。 3．采用静态配气法在气敏测试仪上通过对元件性能进行气敏测试发现： 样品存在一个最佳加热电压，且对乙醇的灵敏度高于丙酮；最佳烧结温度为 500 ℃；醋酸锌浓度为 0.6 mol/L 时为宜；随着 PEG 的加入，元件的灵敏 度先升高后降低，最佳加入量为 0.7 g；乙醇和丙酮的灵敏度都随着其浓度 的升高而增大。 关键词 ZnO 薄膜；介孔；聚乙二醇；气敏性能；溶胶-凝胶 I Abstract The thin film gas sensor made of ZnO has advantages of fast response, short recovery time, good selectivity and pollution to environment and so on. ZnO, which is in the field of extensive application of gas-sensitive material. Nano ZnO film of high quality attracts more and more attention in recent years. ZnO thin film surface pore structure makes great effects on its performance. In this paper, nano ZnO thin film is prepared by sol-gel method. Highly-ordered nanocrystaline ZnO porous films are synthesized using zinc acetate Zn(CH3COO)2·2H2O as precursor and organic surfactant (polyethylene glycol (PEG)) as templates . The influence of experimental parameters on the microstructure, surface topography and gas sensitivity of ZnO films is studied. The following is some results: The hydrolyzing effect of Zn(CH3COO)2·2H2O is obviously reduced after complex agent’s addition . Moreover, a better porous structure is obtained using diethanolamine (DEA) as complex agent .The influence of calcination time is greater than the influence of calcination temperature. The ZnO grain size with increase water temperature rising is not obvious. The pore size of the ZnO film with pore structure is more large as Zn(CH3COO)2 concentration is increasing. The pore density increases and decrease