基于MEMS技术的PCR生物芯片的研究-测试计量技术及仪器专业论文.docxVIP

摘要聚合酶链式反应(Polymerase 摘要 聚合酶链式反应(Polymerase Chain Reaction，简称PCR)技术是发展很快、应用 很广的体外扩增基因片断技术，在生命科学研究及诸多相关领域已经得到了广泛应用。 集成化的PCR生物芯片使得该项技术应用更加方便快捷、高效可靠、降低成本。 本文的工作是利用MBMS技术在单晶硅上制作集成PCR芯片。首先，利用氧化工艺和 LPCVD技术，生长SiO。掩膜层和Si—N绝缘层，以提高反应腔的热效率，保证扩增反应的 顺利进行：其次，用湿法腐蚀和干法刻蚀相结合的方法加工微型腔体，使之作为DNA样 品进行PCR扩增反应的容器；第三，用溅射、光刻等工艺在微型腔体底部制作微型加热 器和温度传感器，实现对反应腔体的加热及其温度的精确测量，提供PCR扩增反应所需 的温度条件。第四，设计温度控制系统，保证PCR反应的顺利进行。 经过不断地分析实验结果，改进制作方法，最终探索出了较好的工艺条件，制备出 了较理想的微型腔体、镍薄膜电阻温度传感器和镍铬合金薄膜电阻加热器，能提供和检 测PCR扩增反应所需的温度，并实现了三温区的循环控制。本文的结果为今后进一步的 研究工作打下了良好的基础。 关键词：PCR： MEM$；微制作： 生物芯片： 微全分析系统 Abst Abst ract Polymerase Chain Reaction is rapidly developing and widely used DNA amp]ification technique，which is widely applied in life science and other related fields。The usage of integrated PCR biochiP makes PCR technology convenient、high—efficiency、reliable、decreased in manufacture。 The work described in this paper is MEMS technology to produce PCR microchiP silicon。The work mainlY consists of four parts：the first is to oxidation and LPCVD technique produce Si02 mask film and Si lNl insulation fiim in order enhance the heating efficiency of micro chamber， and guarantee the carry of the reaction。The second part is the combination of dry etching and etching produce reaction micro chamber， it is the container which the PCR reaction，and DNA sample amplification reaction here。The third part is the sputtering、 photolithography produce heaters and temperature which heat the reaction micro chamber and provide the temperature condition for the PCR reaction。The fourth part is temperature control system which the PCR reaction performing accurately。 After analysis of the experiment result and optimization of technics，we finally up with relatively ideal technics situation and produce relatively ideal miCrO chamber、Ni and Ni／Cr heaters。Which provide and test the temperature condition for PCR amplification。The result of this experiment lays solid foundation for the further research。 Keyword：PCR； MKM$：邢icrofabrication： biochiP；P-TA