基于白光干涉色的光学材料应力量测量的方法研究-光学工程专业论文.docxVIP

硕土=论文摘 硕土=论文 摘 要 光学材料的应力影响材料的均匀性以及光学系统的成像质量。在“近红外大口径相 移平面干涉仪”项目研制过程中，需要分析大口径光学元件如准直物镜和标准镜的残余 应力以及吊装产生的应力，以选择合适的光学材料和元件装夹方式，提高干涉仪的测量 精度。 运用偏振光干涉的原理，采用会聚光路的正交偏振器实验系统，检测光学材料的应 力，根据应力等倾条纹和应力等色条纹分析光学材料的应力方向和大小。研究了基于白 光f涉色的应力定量测量的方法，建立白光干涉色色调与光程差的关系，应力测量实验 中由等色条纹色调分析光学材料应力的大小。 以正六面体光学玻璃为检测对象，运用等倾条纹处理法和四步移相法分析了试件内 部应力方向分布，结果吻合。同时依据白光1二涉色实现了正六面体光学玻璃内部应力的 定量测量，测量精度达到0．5nm／cm。基于白光下涉色的应力定量分析法可用于实际光学 元件应力大小的测定。 关键词：光学材料应力，正交偏振光干涉，等倾条纹，白光干涉色 Abs啪Ict Abs啪Ict 硕k论文 Abstract The stress of optical glass is connected with the homogeneity and the imaging quality．In the research of large．．aperture phase--shifting flat interferometer,we need to measure residual stress and clamping stress of optical dements such as collimation objective lens and reference lens．Analyzing the stress distribution will offer guidance for choosing optical material and the right way of clamping，raise the interferometers measuring accuracy． An orthogonal polarizer experiment system of converging optical path is presented， based on the orthogonal polarization interference theory，to measure stress in optical material． The stress direction and amount distribution will be calculated by analyzing the isoclinie fringe and the isoehromatic fringe．A quantitative stress measurement method bases on the white．1ight interference color(WLIC)is proposed．By analyzing the relation between OPD and the hue of WLIC，the stress amount of optical material will be obtained through the hue of the isochromatic fringe． The stress direction distribution of optical glass cube is analyzed by isoclinie fringe processing and four-step phase—shifting algorithm．Results from the two algorithms are coincided．The stress amount of optical glass cube is obtained by the algorithm based on WLIC．and the accuracy is better than 0．5nm／cm．Thus the algorithm based on WLIC is available to p