基于薄膜体声波谐振器的滤波器设计方法研究-仪器科学与技术专业论文.docxVIP

ABSTRACT Nowadays, more and more wireless applications are coming to our everyday lives. However, the spectrum resources are limited, and the most favorable bands have been assigned to the mobile communications and government projects. The remaining of spectrum bands are neither easy to use nor benefit to exploit. Under this challenge, the primary difficulty we are confronted with is how to improve the isolation between the adjacent bands, which is the key to business success. The RF filter plays a crucial role in the wireless communications with a main function of selecting the target band as well as reducing the interference from the others. The frequency selective characteristic of filter determines efficiency of the usage of band. In other words, this feature refers to whether the roll-off is good or not. In the actual design, there are many complicated aspects, such as the material loss and the temperature sensitivity, should be taken into account carefully. Although the surface acoustic wave (SAW) filters based on the interdigital structures have been well developed to provide the RF signal filtering, at high operation frequencies, for example, above 2 GHz, it becomes challenging to produce sub-micro patterns of electrodes utilizing photolithography in SAW filters, and the properties of the filter deteriorates substantially. Before FBAR devices appear, the engineers use dielectric filters, waveguide filters and LC filters as a foundation for solutions of applications at 2GHz. But there are various problems in these solutions, for instance, the ohm effect, the skin effect and the eddy current effects of metals in the LC filter will contribute to a low quality factor, less than 50, thus it cannot provide a good frequency selective feature. With the Commercially available FBAR piezoelectric resonators have been successful in realizing RF filters, the excellent performance of FBAR filters are able to fulfill the most of communication standards. This thesis starts