基于半导体制冷技术的高精密温度控制系统研究-测试计量技术及仪器专业论文.docxVIP

The The Research of the High-Precision Temperature Control System Based TEC Abstract An important issue in micro／nano·measu“：ments iS the environmental contr01．including temperature，humidity,cleanliness and vibration．The influence of temperature on the measuremem uncertainty is critical for nano scaled dimension．Usually,a clean room has to be built to place in hi曲precision measuring equipment．Its construction cost is hJlgh．The indoor activitieswill also affect the temperature stability．However,that is me础ement equipment itself which needs the hi曲precision environment．So it is very import to develop mini—environment for micro／nano—me龇ements． Traditional temperature—controlled chamber is an integrative body that is composed of a constant temperature chamber and a refrigeration chamber,by natural convection or fans to generate air circulation． This paper develops a new mini—environment that separates the constant temperature chamber from the refrigeration chamber．Any noise caused by the moving parts of the refrigeration chamber can be completely isolated from the temperature chamber．The control system is constituted of a TEC(Thermoelectric Cooler)，a programmable power supply,LabVlEW tool，and a PC．Making use of the system identification theory and system identification toolkit of MATLAB，the mathematic model of the constant temperature chamber Can be identified．A kind of best control strategy is developed using MATALAB embedded LabVIEW programming．The temperature is detected by five temperature sensors around the inside volume．Experiments show that the temperature fluctuation of a single-point iS leSS than±0．02。C and the whole field iS within+0．05。C． The goal ofhigh-precision temperature control is achieved． Key words：high-precision temperature control；system identification；fuzzy control； fuzzy self-adapting PID；neural net control；LabVIEW 插图清单图l-l纳米测量系统的关键技术 插图清单 图l-l纳米测量系统的关键技术 l 图l-2双频激光干涉仪温度漂移 3 图l-3 BuPE恒温箱结构图 ．．3 图I-4分子测量机(MMM)结构图 3 图1．5分子测量机(MMM)剖面图 4