三坐标测量机直线度运动误差建模和测量不确定度评定研究-检测技术与自动化装置专业论文.docxVIP

摘要 摘要 三坐标测量机作为一种大型精密测量仪器，已经广泛应用在现代制造业和科学领 域中。随着坐标测量机测量速度的不断提高，动态误差对测量机测量结果的影响也变 大，测量不确定度理论也成为现代计量领域的研究热点，应用 Monte Carlo 方法评估 测量不确定度已经成为国际上测量不确定度新的研究方向。 目前，三坐标测量机的测量不确定度评价方法主要采用静态评价的方法。由于被 测量的时变性，随机性和相关性，使得实际测量系统的测量不确定度参数不再是一个 确定值，而可能随时间发生变化，因此，静态测量评定方法已不能评定这类问题的测 量结果，此时，动态测量不确定度的评定成为测量不确定度评定的研究内容。本论文 主要采用 GUM 和 Monte Carlo 方法对三坐标测量机的测量不确定度的评定进行了深 入分析和研究，论文的主要内容如下： 首先，本文对三坐标测量机精度检测方法进行分析，并在以往研究成果的基础上， 重新分析和定义了线位移误差和转角误差。以坐标测量机的移动桥架沿 X 向导轨做直 线运动时的状态为研究对象，建模后，分析移动桥架上任意一点在 X,Y,Z 三个运动 轴线上的直线度运动误差与偏转角误差之间的联系，以及气浮导轨对直线度运动误差 的影响。 其次，采用单轴精度检测中的一组实验数据，使用 GUM 法进行三坐标测量机的 测量不确定度评估分析。同时，以空间精度检测中的实验为例，用 Monte Carlo 方法 对空间精度实验的四组数据进行测量不确定度的计算机仿真评定。 关键词：坐标测量机；直线度运动误差；测量不确定度；GUM 法；Monte Carlo 方法 I Ab Abstract II II Abstract Coordinate Measuring Machines(CMMs) has been widely used in modern manufacturing as large precision instruments. High speed has become a trend in the measurement of CMMs. The dynamic errors will become the main factors which influence its measuring result. The measurement uncertainty of CMMs will become a hot task in the modern measure field. The evaluation of the measurement uncertainty using Monte Carlo method has became a new trend in the world. At present, the evaluation of the measurement uncertainty of CMMs mainly adopts the static evaluation. Because the measurand is random and correlative, the parameter of the uncertainty of the actual measurement system is no longer a definite value. The evaluation of the static measurement has not assess the measuring results. The evaluation of the dynamic measurement uncertainty has became a new trend in the world. In this paper, the measurement uncertainty of CMMs was evaluated using Monte Carlo method and the GUM separately. The main contents are follows: Firstly, this paper has carried on the theoretical analysis to the precision inspection of CMMs, on the base of the research outcome of the linear motion error of CMMs, the straight-line motion accuracy modeling has been researched. Line position error and angle erro