太阳能电池材料ZnOAL薄膜结构与性能研究.pdfVIP

太阳能电池材料 ZnOAL 薄膜结构与性能研究 摘 要 当前，ZnOAL 导电膜还没有进入大规模的工业化生产，主要的原因在于： 大面积成膜的技术设备还不过关，工艺的可重复性和可靠性不好，薄膜的厚度和 成分都不均匀，质量不好，最佳工艺条件还没有被人们完全掌握。因此，通过对 ZnOAL 导电膜制备技术和工艺的研究，分析工艺条件和薄膜光学、电学等物理 性质之间的内在关系，摸索出最佳工艺条件，制备出性能优良的大面积 ZnOAL 导电膜，最终实现 ZnOAL 导电膜的大规模工业生产，具有重要的工业应用和经 济价值。 本实验中，我们使用直流磁控溅射装置，采用反应溅射的方法，在普通无机 玻璃衬底上制备掺铝氧化锌(ZnOAL)薄膜，通过改变反应气压、衬底温度、退火 温度等条件，制备出不同的 ZnOAL 薄膜样品，利用 XRD 、SEM、划痕仪、拉曼 等测量仪器对薄膜的结构、形貌、结合力进行了测试，研究了制备条件和后续处 理工艺对薄膜特性的影响。 关键词：直流磁控反应溅射，ZnOAL(掺铝氧化锌)导电膜，薄膜太阳电池 I 太阳能电池材料 ZnOAL 薄膜结构与性能研究 Abstract At present, ZnOAL conductive film has not yet entered a large-scale industrial production, the main reason is that: the film large area clearance technology and equipment is not, of the repeatability and reliability of bad, the film thickness and composition are uneven, poor quality, optimum conditions have not been fully grasp. Therefore, the adoption of ZnOAL conductive film of technical and technological research, analysis and process film optical, electrical and other physical properties between the internal relations, explored optimum conditions, prepared by excellent performance of large area ZnOAL conductive film, ZnOAL conductive film ultimate realization of the large-scale industrial production, an important industrial applications and economic value. The experiment mainly used DC magnetron sputtering device and reactive sputtering to prepare ZnOAl thin film in general glass substrate. By changing sputtering pressure, substrate temperature, anneal temperature and other conditions, the experiment prepared different ZnOAl t