本论文利用测量热释气率以及残余气体分压的方法研究抛光挤.pdfVIP

摘要 本論文利用測量熱釋氣率以及殘餘氣體分壓的方 法研究拋光擠 型鋁合金與特殊拋光擠型鋁合金之釋氣率行為。主要為探討釋氣率曲 線斜率為-2之原理機制。實驗中以極乾燥氮氣之條件進行 ，以達到 最低釋氣率值 ，並使用掃描式電子顯微鏡觀察樣品表面，探討樣品表 面與釋氣率曲線之間的關係。 實驗結果顯示拋光擠型 (空氣環境)之第一小時釋氣率 q1為 -12 2 8.9x10 mbar.L/s.cm 、斜率為-1.7 曝氧， 0.1%+Ar99.9%之特殊拋光 -11 2 擠型鋁合金第一小時釋氣率 q1為 3.3x10 mbar.L/s.cm 、斜率為 -1.4 曝氧， 10%+Ar90%之特殊拋光擠型鋁合金第一小時釋氣率 q1為 -11 2 1.2x10 mbar.L/s.cm 、斜率為-1.6 曝氧， 50%+Ar50%之特殊拋光擠 -11 2 型鋁合金第一小時釋氣率 q1為 1.4x10 mbar.L/s.cm 、斜率為-1.6 。 在經由殘餘氣體分析儀與離子真空計之間的校正實驗所得到的校正 因子乘上各氣體分壓斜率後 ，可發現質量 {14}與質量{28}呈現了 t-2 的速率 ，證實了氮氣主導了空白實驗中釋氣率曲線斜率為 -2之情 形。，另外由掃描式電子顯微鏡表面分析圖可得知當樣品表面的孔洞 越大時其釋氣率以及釋氣率曲線斜率結果較好 ，而孔洞大小似乎與擠 型時的氧氣含量及混合的氣體有關。 i Abstract Thermal outgassing rate measurement and residual gas analyses were used to study two aluminum-alloy chambers, which had different surface treatments. One chamber was extruded by using a diamond-tip die at the air, and the other was extruded by using a diamond-tip die at oxygen and argon atmosphere . The effect of surface roughness on the outgassing rate and the mechanism of the slope -2 in outgassing rate curve were investigates in this work. The chambers were vented to dry nitrogen atmosphere with different venting condition in order to obtain lower outgassing rate. The results showed that in the experiments of the first hour outgassing rate of the extruded aluminum chanber at the air were 8.9x10-12mbar.L 2 /s.cm ,slope were -1.7. The first hour outgassing rate of the special extruded aluminum chanber at the oxygen 0.1% and argon 99.9% -11 2 atmosphere were 3.3x10 mbar.L/s.cm ,slope were -1.4. The first hour outgassing rate of the special extruded alum