热处理对TbDyFe薄膜性能影响.pdfVIP

第十二届全国青年材料科学技术研讨会（2009年11 月27-30） 5 特种功能材料 热处理对 TbDyFe 薄膜性能的影响 a 杜兆富 , 王蕾, 徐立红, 张洪平, 赵栋梁 (钢铁研究总院功能材料研究所，北京 100081) 摘 要：采用磁控溅射方法利用镶嵌靶材制备非晶TbDyFe 薄膜,然后分别在150 ℃ , 300 ℃ , 450 ℃ , 550 ℃ 下退火,研究了热处理对TbDyFe 薄膜性能的影响。通过X 射线，SEM,VSM 测量了薄膜的结构及性能,结果 显示，550 ℃温度下退火的样品出现RFe2 相。随着退火温度的升高，晶粒逐渐长大，空洞网络变短而宽。 薄膜的磁特性显示，其矫顽力及矩磁比均在出现RFe2 相的 550 ℃退火的样品中达到最大值。随着退火温 度的增加，薄膜的易磁化轴从垂直膜面方向向平行膜面方向转动。 关键词：磁致伸缩薄膜；TbDyFe；非晶；退火 Fabrication and characterization of TbDyFe thin films annealed at different temperature DU Zhaofu, WANG Lei, Xu LiHong, Zhang Hongping, ZHAO Dongliang (Functional Materials Research Institute, Central Iron and Steel Research Institute, Beijing,100081) Abstract: The annealing behavior of TbDyFe thin films is investigated in this work. Amorphous thin films were prepared by DC magnetron sputter deposition from mosaic target. Annealing experiments were performed at 150 ℃, 300 ℃, 450 ℃, 550 ℃. Structural characterization, magnetic measurement, and microstructure observation were carried out by X-ray diffraction, vibrating sample magnetometer, and field emission scan electronic microscope. RFe2 phase is formed when samples are annealed at 550 ℃. Other phases observed are α-Fe, rare earth oxide and unknown phases. During the annealing treatment, void networks are formed in the grain boundaries, i.e., the film has a porous structure. The coercivity Hc and the ratio of remnant to saturation magnetization M/ Ms increase strongly. Preferred in-plane anisotropy is observed at higher annealing temperature. Keywords: the TbDyFe film; amorphous; annealing; in-plane anisotropy 0 引言 随着微机械系统的发展，在微制动器领域有巨大前景的巨磁致伸缩薄膜材料也得到了迅 猛发展[1-3]，特别是具有低场高磁致伸缩效应和软磁特性的磁致伸缩材料倍受关注，近几年， 很多课题组对非晶稀土－Fe