Fabrication and Optimization of a Nanoporous Platinum Electrode and a Non-enzymatic Glucose Micro-sensor on Silicon.docVIP

Sensors 2008, 8, 6154-6164; DOI: 10.3390/s8096154 OPEN ACCESS sensors ISSN 1424-8220 /sensors Article Fabrication and Optimization of a Nanoporous Platinum Electrode and a Non-enzymatic Glucose Micro-sensor on Silicon Yi-Jae Lee 1, Dae-Joon Park 1, Jae-Yeong Park 1,* and Younghun Kim 2 1 Department of Electronic Engineering, Kwangwoon University, 447-1, Wolgye-Dong, Nowon Gu, Seoul, 139-701, Korea. E-Mails: yijae2@ (Y.J.L.); dj1982dj@ (D.J.P.) 2 Department of Chemical Engineering, Kwangwoon University, 447-1, Wolgye-Dong, Nowon-Gu, Seoul, 139-701, Korea. E-Mail: korea1@kw.ac.kr (Y.H.K.) * Author to whom correspondence should be addressed; E-Mail: jaepark@kw.ac.kr; Tel.: +82-2-940-5113; Fax: +82-2-942-1502 Received: 27 August 2008; in revised form: 24 September 2008 / Accepted: 26 September 2008 / Published: 1 October 2008 Abstract: In this paper, optimal conditions for fabrication of nanoporous platinum (Pt) were investigated in order to use it as a sensitive sensing electrode for silicon CMOS integrable non-enzymatic glucose micro-sensor applications. Applied charges, voltages, and temperatures were varied during the electroplating of Pt into the formed nonionic surfactant C16EO8 nano-scaled molds in order to fabricate nanoporous Pt electrodes with large surface roughness factor (RF), uniformity, and reproducibility. The fabricated nanoporous Pt electrodes were characterized using atomic force microscopy (AFM) and electrochemical cyclic voltammograms. Optimal electroplating conditions were determined to be an applied charge of 35 mC/mm 2, a voltage of -0.12 V, and a temperature of 25 °C, respectively. The optimized nanoporous Pt electrode had an electrochemical RF of 375 and excellent reproducibility. The optimized nanoporous Pt electrode was applied to fabricate non-enzymatic glucose micro-sensor with three electrode systems. The fabricated sensor had a size of