Fabrication of a Flexible Micro Temperature Sensor for Micro Reformer Applications.docVIP

Sensors 2011, 11, 3706-3716; doi:10.3390/s110403706 OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Article Fabrication of a Flexible Micro Temperature Sensor for Micro Reformer Applications Chi-Yuan Lee *, Chien-Hen Lin and Yi-Man Lo Department of Mechanical Engineering, Yuan Ze Fuel Cell Center, Yuan Ze University, Taoyuan, Taiwan; E-Mails: s911415@.tw (C.-H.L.); s995048@.tw (Y.-M.L.) * Author to whom correspondence should be addressed; E-Mail: cylee@.tw; Tel.: +886-3-4638800 ext. 2478; Fax: +886-3-4558013. Received: 24 February 2011; in revised form: 18 March 2011 / Accepted: 25 March 2011 / Published: 25 March 2011 Abstract: Micro reformers still face obstacles in minimizing their size, decreasing the concentration of CO, conversion efficiency and the feasibility of integrated fabrication with fuel cells. By using a micro temperature sensor fabricated on a stainless steel-based micro reformer, this work attempts to measure the inner temperature and increase the conversion efficiency. Micro temperature sensors on a stainless steel substrate are fabricated using micro-electro-mechanical systems (MEMS) and then placed separately inside the micro reformer. Micro temperature sensors are characterized by their higher accuracy and sensitivity than those of a conventional thermocouple. To the best of our knowledge, micro temperature sensors have not been embedded before in micro reformers and commercial products, therefore, this work presents a novel approach to integrating micro temperature sensors in a stainless steel-based micro reformer in order to evaluate inner local temperature distributions and enhance reformer performance. Keywords: MEMS; flexible micro temperature sensor; micro reformer 1. Introduction Proton exchange membrane fuel cells (PEMFCs) use hydrogen and oxygen as fuel. In this process, oxygen can be produced from the atmosphere, and hydrogen can be