压电微变形镜多路复用驱动技术的研究.pdfVIP

第32卷第2 期 Vo l. 32 No.2 压电与声光 2010 年4 月 PIEZOELECTRICS 8，ιACOUSTOOPTICS 2010 文章编号: 1004-2474(2010)02-0321-04 压电微变形镜多路复用驱动技术的研究 马剑强l ，许晓慧2 ，学保庆l ，张普弘1 ，祷家如1 O. 中国科学技术大学精密饥饿与精密仪桥系，安徽合肥 230027 ， 2. 江西省电力科学研究院，江西南昌 330096) 摘 要:从电路模型上分析多路复用技术在压电微变形镜控制中的驱动特性，设计了基于双 MOSFET 开关的 驱动电路，并对致动器的电压保持能力和l 抗千扰能力做了测试。实验和分析表明，…个高压运放驱动 25 个压电陶 黯(PZT)致动器时，工作频率可达 400 Hz，致动糠的变形控制精度在 2%左右。与传统控制方法相比，该方法具有 低功挺、低成本的优点，适用于自适应光学系统中多通道压电微变形镜的控制。 关键词:自适应光学$压电变形镜:多路复用技术 中阁分类号:TM282 文献标识码:A Study on Multiplexing Control of Piezoelectric Deformable Mirror MA Jianqiang1 , XU Xiaohui2 , LI Baoqing1 , ZHANG Jinhong1 , CHU Jiaru1 O. Dept. of Precision Machinery and Precísion Instrumentation , University of 如ience and Technology of Chína , Hefei 230027. China , 2. Jiang直i Electric Power Research Instítute , Nanchang 330096 , China) Ab愚tract ， The circuit model of multiplexing control of piezoelectric deformable mirror (DM) is investigated. and the double MOSFE下based driving circuit has been designed. The voltage holding and anti-jamming performances of the actuator have been te黯ted. E芷perimental results show that the DM operation frequency could be as high as 400 Hz and the precision is about 2 % when one high voltage amplifier is used to drive 25 PZT actuators. Comparing with the traditional driving system , the new control system has several advantages such as low power consumption. low ωst， etc. The control system can be applíed to the drive multi-channel pi也oelectric deformable mirror. Key wor也.adaptive optics; piewelectric deformable mirror; multiplexing 自适应光学系统中，变形镜(DM)作为…种被