薄膜技术教学资料-02Vacuum+Science+and+Technology.pptVIP

Tiaocixu * 一般温度和压力条件下，所有气体看作理想气体 * 气体分子的速度分布只取决于分子的相对原子质量M与分子热力学温度T的比值 气体分子的速度具有很大分布； 温度越高，气体分子的相对原子量越小，平均运动速度越大,速度分布/分布区间越大； 气体分子的速度分布取决于分子的相对质量M与气体热力学温度T的比值 * 空气中的音速在1个标准大气压和15℃的条件下约为340米／秒。 * Momentum transfer from the gas molecules to the container walls gives rise to the forces that sustain the pressure in the system. The gas pressure, P, is related to the mean-square velocity of the molecules and thus, alternately to their kinetic energy or temperature. * T=300K,气体平均运动速度， va≈460 m/s 为什么墙角打开一瓶香水，对角线墙角要过几秒才能闻dao The mean distance traveled by molecules between successive collisions, called the mean-free path, /lmfp, * 高真空环境，气体分子除了与容器器壁发生碰撞以外，几乎不发生气体分子间的碰撞过程。 分子靠热运动自由而独立地直线前进，只发生与管壁的碰掩而飞过管道 气体分子的平均自由程短，气体分子间相互作用碰撞频繁 * Knudsen准数和真空腔尺寸有关 * 类似河道水流 * 气体流速越小，气体密度越小，真空容器的尺寸越小，气体黏度系数越大，越有利于层流形成。 雷诺准数相当于气体流动的惯性动量与其受到的黏滞阻力之比，它们各自起着破坏与稳定气流的作用 * 流导单位：L/min * 不同几何形状管路的流导已被编制成图表，供真空设计者查阅 * Although conductance and pumping speed have the same units and may even be equivalent numerically, they have different physical meanings. Conductance implies a component of a given geometry across which a pressure differential exists. Pumping speed refers to a given plane that may be considered to be a pump for preceding portions of the system. * 实际有效抽速随Q的减小以及p趋于p0的过程而趋于零 * * * 0.1 Pa 回流造成抽速降低 1000 Pa 大量气体的高速压缩引起泵体和转子的发热和热膨胀，造成配合精度很高的泵体损坏 * * The backstreaming of oil into the chamber * Imparts a preferred direction to molecular motion, but in this case the impulse is caused by impact with a rapidly whirling turbine rotor spinning at rates of 20,000 to 30,000 revolutions per minute. * . * films that getter or combine with reactive gases such as nitrogen, oxygen, and hydrogen. * 3.1 Gas flow regime Molecular flow At low pressure, the mean distance between molecular collisions is large compared to the dimensions of the system, there are only molecule-chamber wall collisions. Viscous flow（laminar flow/turbulet flow） At higher pressure, collision between molecular predomina