热处理温度对浸渍法制备氧化铟锡薄膜之影响摘要 - 国立交通大学机构 .pdfVIP

理度 立 料 (120 ohm/square) 率(90%) 利 論 利 (Dip Coating Process)理來ITO 理度 ITO 量 論 量利 Hall 量量 度率量 率率XRD SEM量 度 粒粒 理度 理降 120/ ( ) I Effects of heat treatment temperature on properties of indium tin oxide films prepared by dip coating Student Yi-Sen Tzeng Advisor Chang-Pin Chou Institute of Mechanical Engineering National Chiao Tung University ABSTRACT Indium tin oxide (ITO) is an important transparent conducting material, especially as transparent electrodes of flat panel display (FPD) including solar cells and touch panels. In this study, we use ITO nano-partical in ethanol solution to prepare the thin film used by dip coating process on quartz glasses. Heat treatment temperature was changed and three different atmospheres were blowing over the ITO thin film during thirty minutes in order to know the relationship between heat treatment conditions and films properties. The heat treatment temperature made the grain size and grain orientation changes. The different atmosphere made different electrical property. We investigated that good film structure and surface morphology decreased the sheet resistance. The optical transmittance was more than 85% in the visible range and the lowest sheet resistance is 120Ω/□. These qualities already reached to the order of touch panel in the industry.