实时动态数字光刻技术制作微透镜阵列的分析-analysis of microlens array fabrication using real-time dynamic digital lithography.docxVIP

II II Abstract With the development of micro optical and the improvement of micro-machining technology, the dimension of micro optical elements is more and more small, and they can realize the functions of microminiature, array and integration. Almost in all engineering application fields such as information processing, military, biomedicine and entertainment, micro-lens array are showing important application value and wide foreground because they can process light information with high speed. The design and fabrication of micro-lens array has become one of the most popular researches in recent years. Photography technology experienced the development from mask era to non-mask era because of the improvement of design theory and fabrication method. Digital photography have many advantages such as save materials to reduce the cost, easy to fabricate, high precision, have no overlay deviation. Because it has so many advantages, people pay more and more attention on it. In this paper, the design and fabrication of micro-lens array based on digital photography was primarily studied. The research contents and results are listed below: First of all, the feature of DMD (Digital Micromirror Device) was fully analyzed. A new method of fabricating micro-lens array was proposed based on DMD digital photography technology. Secondly, Introduced and analyzed the digital moving mask skill and the digital rotating mask skill. According to the scalar diffraction theory and the relation between phase function and relief profile function, the digital mask of microlens is designed. The distance between the single micro-lens can be controlled by computer easily. According to this method the design of digital mask of micro-lens array is flexibly, at last draw the digital mask by the means of programming with CorelDRAW. Finally, a real-time dynamic digital lithography method is proposed. The computer operator controls the digital mask to movement that is uniform to vertical or rotary in t