紫外光辐照选择性自组装制备srtio3薄膜的分析-analysis of srtio _ 3 thin films prepared by selective self - assembly under ultraviolet irradiation.docx

紫外光辐照选择性自组装制备srtio3薄膜的分析-analysis of srtio _ 3 thin films prepared by selective self - assembly under ultraviolet irradiation.docx

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紫外光辐照选择性自组装制备srtio3薄膜的分析-analysis of srtio _ 3 thin films prepared by selective self - assembly under ultraviolet irradiation

西安理工大学博士学位论文 西安理工大学博士学位论文 PAGE PAGE 2 3 3 (NH4)2TiF6/H3BO3=1/1.6 制备的 Sr0.8Ba0.2TiO3 薄膜的介电常数为 216,损耗 0.0233。 (6) 液相自组装制备 Sr0.8Ba0.2TiO3 薄膜,在低电场下,薄膜漏导机制符合 Schottky 模 型。在高电场下,薄膜漏电流机制符合空间电荷限制电流。 (7) SrTiO3 薄膜在 150℃保温-紫外照射循环作用下,表现出了良好的可逆浸润性。 Ba0.77Sr0.23TiO3 薄膜 120℃保温-紫外照射循环作用下,呈现了永久亲水性;SrTiO3 和 Ba0.77Sr0.23TiO3 薄膜在紫外光下照射具有良好的循环光催化性能。 关键词:SrTiO3;薄膜;自组装单层膜;液相自组装;紫外光 摘要 Title: PREPARATION OF SrTiO3 THIN FILMS WITH SELF-ASSEMBLY TECHNIQUE OF SELECTION UNDER UV-LIGHT IRRADIATION Major: Materials Science Name: Guoqiang Tan Signature: Supervisor: Prof. Gaoyang Zhao Signature: Abstract SrTiO3 is one kind of materials with the typical perovskite structure and possesses the properties of the high dielectric constant, the low dielectric loss, the good chemical thermal stability and the better insulation, and it has widely been applied to the micro-electronic devices. Therefore, the study of a simple and environmentally friendly technique to prepare SrTiO3 thin films will have a great significance for the electronic industry. This task adopted the self-assembly monolayer films technique and firstly grew Octadecyltrichlorosilane -self-assembly monolayers (OTS-SAMs) on the glass substrate. Using Sr(NO3)2, Ba(NO3)2, (NH4)2TiF6 and H3BO3 as the raw materials, Sr1-xBaxTiO3 thin films were prepared by the liquid phase self-assembly technique. The microstructures of OTS-SAMs and Sr1-xBaxTiO3 thin films were characterized by these testing methods, including AFM, XRD, XPS, FTIR, SEM and EDS. The film formation mechanism of OTS-SAMs on the substrate surface and the adsorption mechanism of OTS-SAMs to Sr1-xBaxTiO3 thin films were explored. The dielectric properties, the reversible wettability and the cyclic photocatalytic properties of Sr1-xBaxTiO3 thin films prepared by liquid phase self-assemble were studied in this paper and the conclusion was drawn as follows: OTS is dissolved into C6H5CH3 solution and the hydrolytic reaction happens between -Si-Cl bond in OTS and water. Then

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