半导体电阻率涡流检测智能仪器的设计与实现微电子学与固体电子学专业论文.docxVIP

Abstract Title: Design and Realization of the intelligent semiconductor testing instrument based on eddy current method Major: Microelectronics and Solid-state Electronics ^ Name: Ronghai Liang Signature: f::_二r.  一均俨 -一、/Supervisor: Associate Prof. Hongbin PU Signature: H呼 ìl? -一 、/ Abstract With the development of semiconductor technology，semiconductor testing tεchnology needs to be improved. Four-probe method has some deficiency in some aspect. So，也e present situation requires us to find other methods to deal with 也is problem. In也is thesis，we s阳dy on eddy cuπent testing method in semiconductor resist testing. This thesis exhibit some research on 白ee岱ct of excitation frequency，detection distance and coiI size upon 由εtesting results using the experiments and computer numerical simulation method. The 白esis 缸rther analyze the e能ct of the 出ickness upon measurement results ，也.e coil voltage and the thickness of 白e materials influence on resist were analyzed. The thickness of the s缸nple is revised and the resist were calculated with PIC16F877A ，出e results were display wi出 LED digital 阳忧， and experimental prototype were made. Wi由a group ofs叙nples calculated by the prot。可pe show that it is suitable for materials which have the thickness of O.3 O.5mm.Actual measurement data show 也很出e error is less than 10% if 也e resistivity is between 6Q.cm and 60 Q.cm. This thesis presented a method which is using the voltage effective value to direct reflecting 白e real p缸t of the coil voltage 出at can be replace the traditiona1 impεdance 缸lalytical method. Based on experiments， this method can be verified. Keywords: eddy current method; eddy current sensor (ECS); semiconductor testing; resistivi守 、 、 目录 目录 目 录 目 录 1 绪 论 .. .. ... .. ... … … 1 1. 1 课 题 的研 究 背 景 ... … … 1 1. 1. 1 半 导 体 测 试 技 术 概 况 … … 1 1. 1.2 涡 流 方 法 的特 点及 应 用 领 域 … … ，.， ...… … 2 1.2 课 题 的研 究 意 义 ... ... ····，················… … 2 1.3 本 文 的研 究 内容 和 课 题 的研 究 方 法