基于MEMS的曲面仿生复眼设计与制作-光学工程专业论文.docxVIP

华 华 中 科 技 大 学 硕 士 学 位 论 文 II II Abstract With unique imaging characteristics, compound eyes of insects have attracted lots of research interest in bionics. This paper mainly focuses on the study of fabrication method of artificial compound eyes with similar profile and optical feature as the natural compound eyes, aiming at the fabrication of compound eyes with small size, light weight, large field of view (FOV) and high sensitivity to velocity. The fabrication scheme in this paper consists of two parts, structural design and fabrication. With the help of Zemax, the optical design software, the structure of the device is optimized. As the fabrication of the waveguide array is based on the self-focusing of SU-8, programming in Matlab is employed to help simulate the forming process. The main work and outcoming in this paper is as follows: The structure, imaging characteristics, related research work and application of curved artificial compound eyes are illustrated, to show the value of study on it. The optical feature of SU-8 photoresist is studied. It is found that the trend how its refractive index changes with the increase of exposure dose resemble that the non-linear material with self-focusing effect, which proves potential of utilizing the self-focusing effect to fabricate the waveguide array. With the software Zemax employed, the coupling of cured compound eyes and flat sensor array. Finite-different Time-domain (FDTD) method, with Matlab used to program, is employed to study the exposure process of SU-8. It is proved that the fabrication scheme of waveguide array based on self-focusing is applicable, which gives a reference for the following fabrication process. A complete fabrication scheme of curved bionic compound eyes is designed. A sample of artificial compound eye and a mode for curved microlens array are III III fabricated. The test result shows that the sample has fine good profile and the structure resembles the natural compound eyes a lot. Besides