基于MEMS技术的谐振器研究-微电子学与固体电子学专业论文.docxVIP

.r i 自 / —二——兰竺竺L —二——兰竺竺L—iiii鼍葺ii宣i萱ii萱iiiiiiiiii■—■置i暑置iiiiiii置盲置置iiiii置■iiii| f㈣嬲T -H4--7--1 Abstract MEMS resonators,with their small volume，low cost and compatible feasibility of IC，have attracted great attention in the next generation communication systems．As MEMS resonators can meet the requirements of communication systems，they ale of lligh competition in the market and already widely used in network,communication, automobile and industrial equipments． The paper is based on the latest research development of MEMS resonator and the research status of the MEMS resonator at home and abroad is presented first．Then the recent structures and the operating principle of MEMS resonators are listed，and the key parameters are systematic studied here．ADS radio fiequency simulation software is used for analysis of the eleelrical propertios．ney are all forming the foundation for the theoretical analysis of MEMS resonators．The simulation of the MEMS resonator using COMSOL Multiphsics software is given here．The paper compared the results of MEMS resonators with different sizes and StFUCtUl℃S and discussed the relationship bet、黼the frequency and the structure size．The squeeze film damping on the clamped-clamped beam and disk resonators is analysed and the relationship botween the squeeze film damping and the structure size is also given here．Last,the microfabrication process of MEMS resonator is presented and two process#am、舫tll si substratc and SOI substrate ale given．The design and the performance ofresonators can be 0l垴脚jzed and improved through the simulation and the research of MEMS resonators in this thesis．It has great significance for the design of MEMS resonators． Keywords：MEMS；resonator,COMSOL Multiphisics；frequency -II- 』fiatL，! 目录 目录 目录 中文摘要 ．．I Abstract ．． ．．II 第1章绪论 1 1．1 MEMS简介 ．． ．．． ．1 1．2 MEMS谐振器 2 1．2．1 MEMS谐振器的发展现状 2 ● 1．2．2 MEMS谐振船研究的目的与意义 6 1．3本论文主要研究工作 ．．7 第2章MEMS谐振器理论分析 ．8 2．1谐振器的原理和结构 厶 ．．8 2．1．1几种典型的谐振器 。8 2．1．2谐振器的等效电路 ．．1l 2．2几个关键参数和影响因素 ．13