脉冲飞秒激光金属烧蚀的机理探索-凝聚态物理专业毕业论文.docxVIP

华 华 中 科 技 大 学 硕 士 学 位 论 文 II II Abstract Great interest is focused on pulse femtosecond laser micro-nano fabrication due to the ultrashort time scale and ultrahigh peak power density characteristics of the pulse femtosecond lasers. Very high resolution and accuracy can be achieved when ablating with rigid materials. But there is no uniform definition of ablation mechanism of pulse femtosecond laser. At present, with the rapid development of femtosecond laser ablation technology, the pulse femtosecond laser ablation mechanism becomes the attentive focus to the domestic and foreign scholars. In the paper, we have mainly researched the ablation physical mechanism of metals by pulse femtosecond laser, including the following aspects. Firstly, using datas from an Au target, under the framework of the pulse femtosecond laser ablation theoretical model, we gain the dependence of electron and ion temperature evolvement on time and position, which solves the conventional two-temperature diffusion mode using the finite-difference time-domain (FDTD) method in the lower fluences femtosecond laser ablation. Meanwhile, the dependence of the threshold fluence on the pulse length and film thickness can be well described by the two-temperature model, the precise value of the critical length for the diffusion of electron and the corresponding ablation threshold are in good agreement with experimental datas. The corresponding micro-mechanism of physical image is analysed. Secondly, as electron-phonon coupling plays a leading role in the ablation of metals by pulse femtosecond laser. Take noble and transition metals as example , the dependence of electron and ion temperature evolvement on time and position, which is affected by the electron-phonon coupling, is maily researched. Further more, a new law is proposed, which clarifies the parameters of laser technique, such as pulse width, the laser fluence, and electron-phonon coupling factor dependence of the electro