三坐标测量机动态误差建模与测量不确定度评定研究-检测技术与自动化装置专业论文.docxVIP

中文摘要 中文摘要 I I 三坐标测量机动态误差建模与测量不确定 度评定研究 摘 要 三坐标测量机作为一种大型精密测量仪器，已广泛应用于现代制造业。随着 生产的发展，对三坐标测量机的测量效率及精度要求更高，而随着速度的提高， 动态误差就成为影响其测量精度的主要因素。本文对移动桥式坐标测量机在高速 运动时各主要部件的动态特性进行了理论分析，在此基础上，对动态误差的建模 进行了研究。 本文分析了坐标测量机测量过程中速度变化所造成的各运动部件的变形和 偏转。确定了测量机沿 X 轴高速运动时产生的动态误差是机体主要动态误差源， 在此基础上，重新定义了各运动部件产生的动态偏转角，研究了测头位置处机体 动态误差各分量与动态偏转角以及测量速度之间的关系，建立了的机体动态误差 模型。此外，对导致测量机机体动态误差的气浮导轨的刚度和承载能力的计算进 行了理论研究。 对于广泛应用的触发式测头，重点分析了测头预行程的各组成因素，研究触 发时刻测头预行程与触发力之间的关系，建立了触发式测头预行程的动态误差模 型。对测头触测过程中的碰撞问题，建立了振动模型，考察速度参数对测头动态 误差的影响。 在实验的基础上，采用 Monte Carlo 方法对动态测量不确定度进行了评定， 通过对各组实验数据评定结果的对比，发现运动参数中的触测速度是影响测量精 度的主要因素。 关键词: 坐标测量机；动态误差；触发式测头；气浮导轨；不确定度；Monte Carlo 方法 英文摘要 英文摘要 Research on Dynamic Error Modeling and Evaluation of the Measurement Uncertainty of Coordinate Measuring Machines ABSTRACT Coordinate Measuring Machines(CMMs) has been widely used in modern manufacturing as a large precision instrument. With the development of the production, its measuring efficiency and accuracy are required more higher, and the dynamic errors will become the main factors which influence its measuring accuracy. This paper analyzed the dynamic characteristics of the major components in theory, when the movable bridge CMMs moving in high-speed, and studied the dynamic error modeling. This paper analyzed the deflection and deformation of the various moving components which were coursed by the change of speed in measuring process, determined the dynamic error when CMMs moving along the X-axis in high speed is the main source of the structure dynamic errors. On this basis, the dynamic deflection angles of various moving components were re-defined, studied the relation between the structure dynamic errors, dynamic deflection angles and measuring speed on the position of probe, established the model of the structure dynamic errors. In addition, studied the methods to calculate stiffness and load-carrying capacity of the aerostatic slider which lead to the structure dynamic errors in theory. This paper made research on the pre-travel