以微型机器人为基础的自动化显微操作装置为微系统装配中英文翻译、外文文献翻译、外文翻译.docVIP

PAGE XXX设计（XX） 翻译资料 中文题目： 以微型机器人为基础的自动化 显微操作装置为微系统装配 英文题目： A microbot-based automated micromanipulation station for assembly of Microsystems A microrobot-based automated micromanipulation station for assembly of microsystems Sergej Fatikow Mirko Benz Abstract： The development of new types of miniaturized and microrobots with human-like capabilities play an important role in different application tasks. One of the main problem of present-day research is, for example, to assemble a whole microsystem from different microcomponents.This paper presents an automated micromanipulation desktop station including a piezoelectrically driven microrobot placed on the highly-precise x–y stage of a light microscope, a CCD-camera as a local sensor subsystem, a laser sensor unit as a global sensor subsystem, and a Pentium PC equipped additionally with an optical grabber. The microrobot has three piezoelectrically driven legs and two autonomous manipulators as endeffectors; it can perform highly-precise manipulations （with an accuracy of up to 10 nm） and a nondestructive transport （at a speed of several mm/s） of very small objects under a microscope. To perform manipulations automatically, a control system, including a task planning level and a real-time execution level, is being developed. （C）1998 Elsevier Science B.V. All rights reserved. Keywords： Microrobots; Microassembly; Automated desktop station; Assembly planning; Piezoactuators 1.Introduction： There is a growing need for miniaturized and microrobots worldwide. Due to the enormous breakthroughs in conventional robotics and in the microsystem technology (MST),everyone is convinced that the development of remote-controlled or autonomous microrobots will lead to improvements in many areas. Above all, positive results are expected in medicine (microsurgery),manufacturing (microassembly, inspection and maintenance), biology (manipulation of cells) and testing/measuring technique (VLSI) . Medicine