NFF操作训练课件.pptxVIP

NFFOperationTraining

NFF操作训练课件

2Introduction概引ContaminationandControl污染与管制ProcessFlow工艺流程Do’sandDon’t’s规矩DiscussiononExamQuestions考题讨论NFFTour参观实验所

NFFOperationTrainingContaminationandControl污染与管制

4ResearchinNFF

微电子实验所的科研项目Sub-micronSOIDisplayTechnologiesMEMSIntegratePowerSystemAdvancedPackagingProgramAdvancedProcessModuleDevelopingSensorTechnologyGeneChipCompoundSemiconductorTechnologyNovelMagnetic–electronicdevices亚微米SOI显示技术微机电系统集成功率系统先进封装程序先进工艺模块发展传感器技术基因芯片化合物半导体技术新微电器件

5OutlineContaminationProcessVerificationSchemeCleanlinessLevelsProcessCompatibilityWaferStatusGeneralProcessingRequirementsofIndividualModules污染工艺验証指引洁净级别工艺兼容性芯片洁净指数个别模块的要求

6Whatiscontamination

何谓污染ContaminationistheintrusionofimpuritiesintodevicesthatleadstotheirfailureExamples:DegradationofOxideIntegrityThresholdVoltageShiftLeakage污染：器件因杂质而导致功能失效例如：氧化层失效国值电压漂移漏电

7Knock-onEffectBathforResistStripContaminantsCleaningBathToolse.g.CassetteFurnaceAFurnaceBEtcherABathforResistStrip

8Whycontaminationmatterstoyou?

污染与我可干？It’slikedisease,easytospreadacrossthelaboratoryIt’shardtobestoppedoncecausedAnycontaminationyoucauseruinsothers’yearsofeffortsYouaretheonlyonewhocanhelpusstopitfromspreading有如瘟疫一般，易于传播到实验的每个角落一旦发生，难以制止因你做成的污染，可把别人多的努力毁于一旦可以帮助我们阻止污染传播开去的，只有你！

93CommonestCMOSKillers

CMOS三煞MetallicContaminantsIonsofheavyandtransitionmetals(Au,Ag,Pt,Ni)IonsofstandardMetal(Al,Ti)AlkaliIons(K,Na)OrgnaicPhotoresistandPolymersBodyOilParticlesCarbonMetalpiecesfromlifted-offwafersYounameit金属污染物重金属和过渡金属(金、银、白金、镍)的离子常规金属的离子(铝、钛)碱性离子(钾、钠)有机污染物光刻胶和聚合物体液微粒炭剥离了的金属碎片不能尽录

10ContaminationControl

污染管制NFFPolicyandRulesProcessVerificationSchemeProcessingRequirementsofindividualmodulesYourawarenessandobservance政策与规则工艺验証指引个别模块要求的工艺规格你对污染的关注与规则的尊从

11NFFPolicyandRules

政策与规则AllUsersGeneralCleanroomRulesandRegulationsNon-CMOSUsersProcessFlowSatisfactoryComp