光学微扫描显微热成像扫描零点定标方法研究.pdfVIP

第 29 卷第 8 期 2009 年 8 月 文章编号: 0253-2239(2009)侃-2175心5 光学学报 SINICA Vol. 29. No.8 2009 光学微扫描跟微热成像扫描苓点定标方法研究 高美静1.2 金伟其1 王震 l 于杰l e ~t京理工大学克也工穗系. ~t京 100081; 2 燕山大学光电子系，河北秦皇岛 066004 ) 摘要 为改养巴研制光学微扫描极微热成像系统的空间分辩力，微归描苓点偏要确定。基于几何脱那~.研究提出 了…种利用数字阁像处照技术进行零点定标的方法。给出 f微扫描零点的定义、详细分析了零点定标原理及方 法，完成了实际显微热成像系统的微扫描零点定标。针对红外热图像，模拟零点定标前后的实际系统，采用不同意 构方法准行了仿真研究，给出了评价参数;利用零点定标后的光学微扫描踉微热成像系统采集低分辨力.!?.微热阁 像序列进行过采样重构研究，仿真和实验结果表明了该方法的有效性，从而得到了高分辨力克学微扫描服微热成 像系统，可1使用于需要.!?.微热分析的场合。 关键词 成像系统;H微热成像 p 光学微扫描;数1妄图像处理:零点定标 中图分类号 TN211 文献标iR码 A doi: 10.37881 AO 2175 Zero Calibration for the Designed Microscanning Thermal Microscopic Imaging System Gao Meijing l. 2 Jin WeiqP Wang Xia 1 Yu Jie 1 ( 胁p叫e肌饵时叫t of ο句pμ川仰叫t优阳削化切ωαωl 趴问g以阳i 2L胁沁均p阳αT付tm仰eη时t of F，肌hoωtoωeleωctrot:肌l ， Yaα旧h阳α?饨1 Un加?ηt山i仇ωve叼1旭γ刚s剖it切y ， Qψt切?饨州t仇hl圳4ωα?叼t咿gd由α0 ， H抽ebeiω 0660∞04. Cαhi仇忧峭α / Abstract In order to improve the spatial resolution of the optical microscanning thermal microscopic system. the zero of microscanning should be determined to complete the oversample reconstruction. Based on the geometric principle and digital imaging processing , a new zreo calibration was presented. The definition , the working principle and the method were analyzed , and the microscanning zero calibration of the real system was done. Different reconstruction methods were applied to reconstruct the thermal image and the real thermal microscopic image , moreover the evaluation parameters were given. Results of simulation and real thermal imaing peocessing show the availability of the zero calibration , thus the high resolution optical microscanning thermal microscopic system has been achieved. The sysωm can be applied into many systems which need microscopic thermal anslysis with high spatial resolution. Key words imaging systems; thermal microscopic system; optical microscanning; digital image processing; zero calibration 1 引 为满足大规模集成电路、生物医学和科学研究 等领域对细微热分析的需求 .20 世纪 90 年代开始 国外推出显微热成像系统[1-川但由于采用制冷型 红外探测器作