石墨基体表面绝缘导热陶瓷涂层的制备工艺分析-preparation process analysis of insulating and thermally conductive ceramic coating on graphite substrate surface.docxVIP

AbstractBasedonlowthermalresistancepackagingtechnologyforhigh-powerLEDdevices,thispaperexploredthetechnologyofpreparinginsulativeandheat-conductivemultiphaseceramiccoatingsonthesurfaceofgraphitematrix.(1)AlN-Al2O3·B2O3-SiCcoating.(2)Si3N4-SiCcoating.Firstly,compositeslurryofH3BO3、AlNpowderandmonatomicsiliconpowderwaspreparedthoughballmillingtocoatonthesurfaceofgraphitematrix.Withthetechnologyofpowderbed,AlN-Al2O3·B2O3-SiCmultiphaseceramiccoatingswassynthesizedsuccessfully.MonatomicsiliconpowderwaschosenastherawmaterialforSi3N4-SiCcoating.Theslurryofsiliconpowderafterballmillingwascoatedtothesurfaceofgraphitematrix.Si3N4-SiCcoatingwassuccessfullysynthesizedwhenheattreatmentinnitrogenwasemployed.Systimaticlyreserchedtheimpactofdifferentprocessconditionsonthesynthesisofcoatingandtheinterfacebondingbehaviourofcoatingandmatrix.Andreserchedthepropertiesofmultiphaseceramiccoatings.AsforAlN-Al2O3·B2O3-SiCmultiphaseceramiccoatings,ithassmoothsurfacewhenitwaskeepin1400℃for2hwiththepowderbedsinteringprocesswasappliedinheattrezhiatment.ThemainphaseofthecoatingisAlN、SiCandAl-B-O,thestrctureofthecoatingwascompact,finelycombinedwiththematrix,noflawsorporeswerefound.Thetemperatureofheattreatmenthasabiginfluenceonthesynthesisofthecoating.Poreswerefoundwhenthemaximumtemperaturewas1450~1500℃；Theratiooftherawmaterialhaslittleimpactonthecompositonofthecoating.Butithasabiginfluenceonthesurfacemorphology,withthedecreaseoftheratioofSi/Al,flawsappeared.Nanometerimpressiontestofthesampleheat-treatedin1400℃for2hshowedthatthenanometerhardnesswas7.7Gpa,andthemodulusofelasticitywas128.3Gpa.Themethodofelectricalresistivitytestwasdesignedbytheauthor,andtheelectricalresistivitywas3.6×107Ω·m.ThispaperdidsomepreliminarystudyonthesynthesizeprocessofSi3N4-SiCmultiphaseceramiccoating,andsomepreliminaryanalysisonthesurfacemorphology.Theprocessoftheheattreatmenthadabiginfluenceonthephaseofthecoating.Themainphaseofthecoatingkeptfor2hwhenitwassinteredwithpowderbedprocessto1500℃wasSiC；Themainphaseofthecoatin