多晶硅铸锭炉热场设计及计算机模拟-机械设计及理论专业论文.docxVIP

摘 摘 要 万方数据 万方数据 摘 要 一台优良的多晶硅铸锭炉，除了需要具备平稳的机械传动系统，便捷的供 水装置、抽真空及自动控制系统，关键还得具有一个合理的热场。热场作为铸 锭炉的核心，其对多晶硅定向凝固过程中的固液界面及熔体的流动起着至关重 要的作用，而加热器、隔热层及坩埚等部件构成了热场的主体，因此可以通过 对加热器、隔热层及坩埚等部件的优化设计来调节定向凝固过程。 本文首先对铸锭炉热场的理论基础和影响机理进行了简单的介绍，其次以 上海晨华型号为 ZG-5D 的多晶硅铸锭炉作参考，并以坩埚为设计基准，由内向 外对热场的主要部件(包括：加热器和隔热层)进行了选材、优化设计及校核计算。 设计的目的主要是期望获得更加合理的热场结构及温度梯度分布，同时，也为 将来研制一种高效的多晶硅铸锭设备提供参考依据。 最后，本文在优化设计的基础上，采用 Comsol Multiphysics 多物理场模拟 软件，验证了使用倒锥形坩埚得到的硅熔体热场及流场的分布情况，并选用底 部凸形及圆形坩埚作对比，以此来检验坩埚设计的合理性，进而可初步判断整 个热场设计的合理性。研究表明，与其他两种形状的坩埚相比，使用倒锥形的 坩埚得到的热场更加均匀，且固液界面更为平整，即制得的多晶硅锭质量更高。 说明热场中应选取侧壁有一定倾角的坩埚，即表明第三章关于热场的初步设计 结果基本符合设计要求。 关键词：多晶硅铸锭炉；定向凝固；热场；优化设计；计算机模拟 I AB ABSTRACT ABSTRACT In addition to the mechanical transmission with smooth and convenient water supply device, vacuum and automatic control system, the key for a good polysilicon ingot furnace is to have a reasonable thermal field. As the core of ingot furnace, which plays a vital role for solid liquid interface and melt flow of polysilicon in directional solidification process, and the heater, insulation layer, the crucible and other parts constitute the main components of the thermal field, therefore, can be adjusted by optimizing the design of the heater, insulation layer, the crucible and other components to modulate the directional solidification process. Firstly, made a simple introduction to the theoretical basis and the impact of the mechanism of thermal field, followed by Shanghai Chen Hua model ZG-5D polysilicon ingot furnace for reference, then choose the crucible as design criterion, aim at make the selection of materials, optimization design and checking calculation to the main components of the thermal field (including: heaters and insulation layer)from inside to outside. The main purpose of the design is to expect acquire a more reasonable thermal field and temperature gradient distribution, but also provide a reference for the future development of a highly efficient ingot equipment. Finally, in order to test the rationality of the design