超声膜厚测量机理及传感器研究-机械设计及理论专业论文.docxVIP

南京航空航天大学硕士学位论文 摘 要 工业生产中，齿轮、轴承、活塞等机械中，其相对运动表面间大部分依靠润滑油来降低摩 擦和磨损，合适的油膜厚度是机械设备能否正常工作的一个关键因素。传统测量油膜厚度的方 法是基于电学和光学原理，但是由于这些方法都存在一定的缺陷，限制了它们的应用范围。因 此，较之利用超声反射系数法测量油膜厚度具有很多优点。本文通过理论研究和实验分析建立 了超声反射系数与油膜厚度的关系，并证明了超声反射系数法测量油膜厚度的可行性、准确性。 论文以声学及流体力学理论为基础，针对于不同油膜厚度建立了弹簧模型和连续模型，并 对这两种模型进行了比较。结果表明：连续模型只需要测量共振频率，无需测量信号的振幅， 因此它相对于弹簧模型而言，不易受噪声干扰且操作较为方便，但是若油膜的共振频率大于 60MHz，基于连续模型的测量原理不再适用，这时应采用弹簧模型来测量膜厚。 由于测量油膜厚度涉及电、固、声等多物理场耦合作用，各元素耦合特性决定着超声传感 器的特性。通过解析求解及 ANSYS 耦合场数值分析，完成了压电陶瓷片选型及超声传感器特 性分析。在此基础上，设计并制作了基于超声原理的油膜厚度超声传感器。 通过实验完成了压电陶瓷与超声传感器样品的特性分析，并初步验证了超声反射系数法测 量油膜厚度原理的合理性。根据测量结果分析了影响超声反射系数法测量准确性的因素，为进 一步研究提供了一定的参考依据。 关键字：反射系数，连续模型，弹簧模型，耦合场，压电陶瓷 I 超声膜厚测量机理及传感器研究 Abstract In the industry, most mechanisms are lubricated by oil to reduce the friction and wear between two moving surface, these mechanisms include gears, bearings, pistons and so on. An appropriate film thickness is a fatal factor to ensure these machines working normally. The measuring methods of film thickness often used are based on the electronic and optical principles. However, some disadvantages limite their application. Therefore, the method which uses reflection coefficient to measure oil film thickness has lots of advantages in contrast to these traditional methods. The relation of reflection coefficient and oil film thickness has been investigated by the analytical and experimental methods, and the measurement of oil film thickness based on this principle is proved feasibility and accuracy. Based on the theory of acoustics and hydrodynamics, continuous model of the reflection coefficient method and spring model are established according to the different oil film thickness, and these two simulation results of the correspond models are compared with each other. The results show that the continuous model only needs to measure the resonance frequency and without signal amplitude when measuring film thickness. Therefore it is not disturbed easily by the noise, and the film thickness measurement is more convenient. But if