基于FFT的条纹图规则噪声滤波.pdfVIP

Vol. 27 No.3 第 27 卷第 3 期 湖北汽车工业学院学报 2013 年9 月 Journal of Hubei University of Automotive Technology Sep.2013 doi: 1O.3969/j.issn.l∞8-5483.2013.03.015 基于 FFT 的条纹图规则噪声滤波 张伟1 ，朱福龙2 (1.湖北汽车工业学院机械工程学院，湖北十堪 442∞2: 2. 华中科技大学机械科学与工程学院，湖北武汉 43∞74) 摘要.影子云纹测量技术用于微电子封装基板翘曲测量中条纹图往往受到被测基板均布芯片产生的规则噪声 的影响，导致包裹相位质量较差，不能正确解包，引起较大的测量误差。针对条纹图中的规则噪声，分别采用常用 的均值滤波、中值滤波和傅里叶变换滤波方法处理条纹图，傅里叶变换滤波方法能有效消除条纹图中规则背景噪 声的影响，改善包裹相位图质量，提高测量精度。 关键词:条纹图E 规则噪声;滤波;快速傅里叶变换 中图分类号:白1741 文献标志码:A 文章编号:1∞8-5483 (2013 )03-∞61-04 Filter of Regular Noises for Fringe Pattern ßased on FFT 1 Zhang Wei , Zhu Fulontf (1. School of Mechanical Engineeri吨， Hubei University of Automotive Technology, Shiyan 442∞2， China; 2. School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 43∞74， China) Abstraéli Shädow inoiré techniqtie is widely i1sed in measuri Iig the wa甲age of substrate of microelectronics packaging , the fringe þâttern is influenced by the regular noises causëi:l by the uniformly assembling chips. The noisës cause ihe lower quality of wrapped. phase and cannot correctly perform phase unwrapping. For denoising the regular noises of fringe pattern , the mean filter, median filter and Fast Fourier Transform filter were adopted to improve the quality of fringe pattern. 四le image processing results show that the FFT filter can decrease the influence of regular noises and increase the measurement precision. Key words: fringe pattern; regular noise; filter; Fast Fourier Transform (FFI丁 微电子产业中♀对产品可靠性要求较高，需要 情况，影子云纹测量一般会结合四步相移技术进一 在整个生产过程中对采用不同手段提高产品可靠