numerical analysis of dynamic effects of a nonlinear vibro-impact process for enhancing the reliability of contact-type mems devices数值分析的动态效应非线性vibro-impact过程加强接触式mems器件的可靠性.pdfVIP

Sensors 2009, 9, 10201-10216; doi:10.3390/ OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Article Numerical Analysis of Dynamic Effects of a Nonlinear Vibro-Impact Process for Enhancing the Reliability of Contact-Type MEMS Devices Vytautas Ostasevicius 1, Rimvydas Gaidys 2 and Rolanas Dauksevicius 1,* 1 Institute for Hi-Tech Development, Kaunas University of Technology, Studentu 65, LT-51369 Kaunas, Lithuania; E-Mail: vytautas.ostasevicius@ktu.lt 2 Faculty of Informatics, Kaunas University of Technology, Studentu 50, LT-51368 Kaunas, Lithuania; E-Mail: rimvydas.gaidys@ktu.lt * Author to whom correspondence should be addressed ; E-Mail: rolanas.dauksevicius@ktu.lt ; Tel.: +370 37 353637; Fax: +370 37 353637. Received: 9 November 2009; in revised form: 7 December 2009 / Accepted: 10 December 2009 / Published: 16 December 2009 Abstract: This paper reports on numerical modeling and simulation of a generalized contact-type MEMS device having large potential in various micro-sensor/actuator applications, which are currently limited because of detrimental effects of the contact bounce phenomenon that is still not fully explained and requires comprehensive treatment. The proposed 2-D finite element model encompasses cantilever microstructures operating in a vacuum and impacting on a viscoelastic support . The presented numerical analysis focuses on the first three flexural vibration modes and their influence on dynamic characteristics. Simulation results demonst