光纤法布里—珀罗传感器解调技术的研究-物理电子学专业论文.docxVIP

摘 摘 要 光纤法布里一珀罗(F-P)传感器作为一种高精度的干涉型光纤传感器有着 广泛的应用前景。按照信号解调方法的不同，该种传感器可分为强度调制解 调型和相位调制解调型光纤卜P传感器。强度法是干涉型传感器采用的最古 老、最简单的方法，它采用单色激光光源作为系统的光源。优点是原理简单， 灵敏度高；缺点是受外界干扰大，工作点难控制。 本文首先利用光的多光束干涉理论分析了强度调制解调型光纤FP传感器 的工作机理，由此得到了强度调制解调型光纤F—P传感器的三种解调方法：直 接解调的强度调制解调法、间接解调的双波长调制解调法以及在双波长调制 解调法的基础上针对MEMS压力传感器的四波长调制解调法。通过理论分析建 立了这三种传感器解调的理论模型。 本文的重点是提出了光纤卜P传感器的双通道双波长解调方法，并在此基 础上建立了传感器的实验解调系统：理论分析与实验研究了双波长法解调光 纤F—P传感器的基本原理，证明了双波长双通道解调法可以补偿传感器光网中 和波长无关的变动引起的误差。设计并建立了F—P微位移传感器的实验解调系 统，进一步提出用四波长法解调了MEMS压力传感器，并与双波长法解调结果 进行了比较。实验结果表明，该传感系统具有良好的线性特性， 并且具有灵 敏度高、稳定性好、抗干扰能力强等特点，可实现产品化，有着广泛的应用 前景。 本文最后讨论了光纤传感器调制解调系统存在的问题和改进方法。 关键词：光纤传感器，法布里一珀罗腔，双波长，系统优化 lIl ABSTI己ACTFiber-optic ABSTI己ACT Fiber-optic Fabry-Perot(F—P)sensor is kind of high precision interferometric sensor，and this kind ofsensor has broad application prospect．F-P can be classified into two kinds of by their demodulation methods．One is intensity modulation／demodulation，and the other is phase modulation／demodulation．The intensity modulation method is the oldest and simplest method for fiber-optic sensor，in which homochromatic laser is used as system light source．The advantages of method are simple principle and high sensitivity；while the disadvantage is that it is easy to be disturbed and is hard to control operation． At first，we studied the theory of multi-light beam interfeormetry．After analyzing the modulation／demodulation principle of intensity and phase for fiber-optic Fabry—Perot sensor，we present three demodulation methods：directive(intensity)，in-dimative(dual—wavelength)and four-wavelength demodulation aiming at MEMS pressure sensor． A technique for demodulating the fiber Fabry-Perot sensor is presented based the dual-path and dual—wavelength demodulation principle．The dual—path system is constructed．The Theoretical analysis，simulation calculations and experimental result are presented．It is proved that the method carl eliminate errors resulting from wavelength—independent variations in the fiber interconnect to the sensor．The