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薄膜体声波谐振器结构与振动分析.pdf

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STRUCTURESANDVIBRATIoNANALYSISOF FILMBULKACoUSTICWAVERESoNAToRS JiWANG,Jian·songLIU,Jian—ke HUANG DU,De-jin PiezoelectricDevice Laboratory,School ofEngineering,NingboUniversity 818 315211,China FenghuaRoad,Ningbo,Zhejiang The for wirelesscommunicationdemandssmaller technology size,highfrequency,highperformance,Iow ener鼬7 IowcostRF Current basedondielectricorSAWresonators consumption,andcomponents.products are Filmbulkacoustic etheIatest not eitherduetothesizeorthecircuitlOSS. enough resonators(FBAR)ar smallsizeand RF tothefast wireless technologyoffering highfrequencycomponents growingpersonal communicationWereviewedthecurrentstate—of-artoftheFBAR and technology. technologyexplained the mechanismofFBAR.Withtwo vibration and working major models,thickness—extension alsodescribedtheFBARstructureand ofmateriaIselection. thickness.shear.we principle Furthermore,we choice theeffectofelectrodesonthevibration the of analyzed frequency,andexplained quarterwavelength reflectorsintheSMR.Wewantto essential and aboutFBAR to provide conceptsknowledge technology areinterestedin itfurther.With onthevibrationmodelsand who engineers studying enoughknowled

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