不同衬底上的碳纳米管制备及其拉曼光谱-光学专业论文.docxVIP

摘要 摘要 万方数据 万方数据 不同衬底上的碳纳米管制备及其拉曼光谱 摘要 本文主要的研究内容为不同衬底上的碳纳米管阵列的制备，结合扫描电子 显微镜及拉曼光谱进行样品的表征。全文简要地介绍了碳纳米管及其拉曼光谱 相关概念，研究了硅衬底和金属衬底(304 不锈钢钢和铜)上生长碳纳米管的一系 列问题。研究发现，当衬底为硅时，乙炔流量为 30 sccm，氢气流量为 100 sccm 比较适合碳纳米管的生长，气体流量同时扩大一倍时，生长出来的定向碳纳米 管阵列的管状物曲线最平滑，定向性最好，密度最大，氨气刻蚀工艺方面，100 sccm 流量的氨气下刻蚀催化剂 10 min 时，生长出来的碳纳米管阵列缠绕最少， 表明此时管间范德瓦尔斯作用力最平衡；当衬底为金属时，实验表明催化剂过 厚不适合碳纳米管的形成，同时发现合适的过渡层对生长碳纳米管会有一定改 善效果，经对比发现 304 不锈钢衬底上沉积 15 nm 钛过渡层，铜衬底上沉积 5 nm 铝过渡层对生长碳纳米管的改善效果最佳。最后我们成功地在 304 不锈钢衬底 侧面制备出碳纳米管阵列，由于还未进行系统研究，只对该现象做了定性分析。 关键词：碳纳米管； 阵列； 化学气相沉积； 拉曼光谱 II Ab Abstract Fabrication and Raman spectrum of carbon nanotubes on different substrates Abstract This dissertation will mainly disscuss how to fabricate carbon nanotubes(CNTs) on different substrates. We combine scanning electron microscope with Raman spectrum to test the sample. The thesis introduces some concepts of CNT, then research how to get CNTs on silicon substrate and metal (304 stainless steel and copper) substrate. We get the conclusion that when the rate of acetylene is 30 sccm and hydrogen is 100 sccm, the CNTs can be fabricated well.If the rate doubled both,the directionality and density of the CNTs arrays are the best, the curve of the tube is the most smooth.The aspect of etching,in the condition that to use 100 sccm ammonia gas etch 10 min, the CNTs arrays twine less and van der waals force betwween the tubes is more balanced. On the metal substrate, the experiement indicated that the the thick catalyst is not effective for fabricating CNTs.We also discussed the influence of different buffer layers and get the conlusion:depositing 15 nm titanium on 304 stainless steel and 5 nm aluminum on copper can improve the CNTs growing on the substrates.At last, we fabricated CNTs arrays at the side of 304 stainless steel substrate,because the experimental data is insufficient, so we only do some qualitative analysis. Key words: Carbon Nanotubes; Arrays; Chemical Vapor Deposition; Raman Spectrum III 目录 目录 目录 第一章 引言.........................