Bragg-Angle Diffraction in Slant Gratings Fabricated by Single-Beam Interference Lithography英文文献资料.docVIP

Optics and Photonics Journal, 2012, 2, 13-16 /10.4236/opj.2012.21003 Published Online March 2012 (http://www.SciRP.org/journal/opj) Bragg-Angle Diffraction in Slant Gratings Fabricated by Single-Beam Interference Lithography Xinping Zhang , Shengfei Feng, Tianrui Zhai * College of Applied Sciences, Beijing University of Technology, Beijing, China Email: zhangxinping@ * Received January 20, 2012; revised February 18, 2012; accepted February 27, 2012 ABSTRACT A single-beam interference-lithography scheme is demonstrated for the fabrication of large-area slant gratings, which requires exposure of the photoresist thin film spin-coated on a glass plate with polished side-walls to a single laser beam in the ultraviolet and requires small coherence length of the laser. No additional beam splitting scheme and no adjust- ments for laser-beam overlapping and for optical path-length balancing are needed. Bragg-angle diffractions are ob- served as strong optical extinction that is tunable with changing the angle of incidence. This device is important for the design of efficient filters, beam splitters, and photonic devices. Keywords: Slant Grating; Single-Beam Interference Lithography; Bragg-Angle Diffraction 1. Introduction portant for practical applications in high-contrast filters, beam splitters, and in the design of photonic crystal devices. Interference lithography [1,2] is a conventional technique for producing large-area one- and two-dimensional grat- ing structures in the micro- or nano-scale. In particular, this technique can be used to fabricate the master grat- ings for the construction of metallic photonic crystals [3], which are important for the development of new lasers,[4] polarizers [5], filters [6], and other photonic devices [7,8]. High flexibility in the interference-lithography scheme using different arrangements of the laser beams enables realization of a variety of photonic structures [9-11]. Con- v