常压化学气相沉积法二氧化钛薄膜的制备与掺杂性能分析-preparation and doping performance analysis of titanium dioxide thin films by atmospheric pressure chemical vapor deposition.docxVIP

浙江大学硕十学位论文摘浙江大学硕十学位论文摘 要论文介绍了Ti02薄膜光催化和亲水性的研究背景、自清洁特性和原理，比 较了各种TiO：薄膜的制备技术和方法，并对其光催化和亲水性的影响因素进行 了总结。提出结合浮法玻璃在线，以常压化学气相沉积法(APCVD)制备N掺 杂Ti02薄膜的实验目标。在实验室条件下以TiCh和02为先驱体，采用常压化学气相沉积法(APCVD) 制备得到具有一定光催化性和亲水性的Ti02薄膜，并且以N20作为掺杂剂，对 薄膜进行了N的掺杂，在一定程度上提高了薄膜可见光照射下的光催化性和亲 水性。文章系统研究了基板温度、载气流量、02流量和N掺杂量等工艺参数对TiO： 薄膜微结构、组成和性能的影响。APCVD法在较低的基板温度下制备出的Ti02 薄膜基本上是非晶态的，光催化效率很低。随着基板温度的升高，反应速度增加， 结晶类型由锐钛矿相逐渐向金红石相转变，粗糙度增大，亲水性逐渐升高，光催 化效率在锐钛矿和金红石混合晶型时最佳。随着载气流量的增加，薄膜的厚度增 加，结晶性能提高，光学带隙变窄，光催化效率增加，亲水性没有明显变化。氧 气流量对晶体类型和反应速率没有直接的影响，随着氧气流量的增加，薄膜的光 催化性能下降，亲水性上升。450℃反应温度时，薄膜表面会有方块状物质生成， 经推断为NazO·xTi02，实验证明它的存在对薄膜的光催化性能有害，但对亲水 性没有影响。掺杂剂N20的流量对薄膜的结构有很大影响，随着流量的增大，锐钛矿相 Ti02逐渐向金红石相转变，金红石晶体的颗粒尺寸也不断减小。当N20流量大 于80secm时，表面出现雪花状分形生长的物质，其中含有Na元素，随着流量 增大，雪花的数量增多，面积变小。Ti02薄膜的吸收限随着N20流量的增加， 先红移后蓝移。N20流量过大和过小都会导致薄膜在紫外光照射下光催化性能下 降，N的掺杂可以提高薄膜可见光照射下的光催化性能。薄膜亲水性随着N的 掺杂量增加而升高。关键词： CVD、Ti02薄膜、自清洁、光催化、亲水性浙江大学硕士学位论文ABSTRACT浙江大学硕士学位论文ABSTRACTIn this paper a comprehensive introduction of titanium dioxide film，which was focused on photocatalysis and hydrophilicity,had been given．The research background，the self-clean characteristic and some kinds ofpreparation methods were discussed．A summary about the factors which affect the photoeatalysed efficiency and hydrophilicity was made．The paper put forward all aim to deposit N—doped titanium dioxide film on西ass substrate by the atmospheric pressure chemical vapordeposition(APCVD)method．Using TiCl4 and 02踮precursors．titanium dioxide thin films had been deposited by APCVD method．Nitrogen had also been doped in the film when N20 gas was added as the dopant．The hydropilicity and photocatalysis of the samples were studied．The effects of the substrate temperature，carrier gas flux，02 flux and N doping level on the microstructure，composition and properties ofthe films have been studied synthetically．The film prepared at low temperature was amorphous Yi02 and it’S photocatalysed efficiency was very low．Wi血the subtrate temperature’S increasing． the reaction rate increased，the crystal type was