薄板型微悬臂梁流固耦合特性及其尺度效应分析-analysis of fluid-solid coupling characteristics and scale effect of thin-plate microcantilever.docx

泊松比的提高以及长宽比的增大，流固耦合作用的影响程度将逐渐增强。针对薄板型微悬臂梁频率响应中的尺寸效应以及浸于粘性流体中的微悬臂 梁流固耦合特性进行实验研究，基于测量结果对微悬臂梁谐振频率与尺寸效 应、流固耦合特性之间的关系进行分析，论证了本文建立的理论模型和提出的 基于等效参数提取的简化数值方法在处理薄板型微悬臂梁流固耦合特性问题上 的有效性，同时证明了仿真结论的正确性。本文通过对薄板型微悬臂梁流固耦合特性及尺度效应的研究，建立了谐振 频率与流体密度、粘度和微悬臂梁材料特征长度等多因素之间的定量关系模 型，分析了流固耦合作用及尺度效应影响下，微悬臂梁频率响应的变化规律， 这对揭示流体对微纳米结构动力学特性影响及其表现出的尺度效应的物理机 制、高灵敏微悬臂梁传感器设计和应用具有重要意义。关键词： 薄板型微结构；频率响应；流固耦合；尺度效应；微分求积法； Cosserat 理论AbstractThe microcantilever sensor is an important tool to explore the microscopic world, and it is widely used in the microscopic field for morphology detection and parameter measurement. Since frequency parameters are easy to obtain, the dynamic measuring method which the object is indirectly detected through variation of resonance frequencies of microcantilever sensors, has become a research hotspot. Most of microcantilever sensors work in a fluid environment. The fluid-structure interaction phenomena caused by the microcantilever vibration in the fluid will cause abnormal decline of resonant frequencies, and the scale effect occurs. This phenomenon has brought greater difficulties in quantitative research using the microcantilever sensor as a tool. Therefore, revealing mechanisms of fluid-structure interaction and scale effect for microcantilever sensors, and then revising the relationship model between resonantfrequencies and the object measured，has become an important research content.This paper aims at determining the multi-factor quantitative relationships between resonant frequencies of the microcantilever and the fluid density, viscosity, characteristic length of the material, and establishes a two-dimensional fluid-structure interaction model which takes the scale effect into account for microcantilevers, and gives a simplify numerical method. On that basis, the fluid-structure interaction characteristics and the scale effect on the frequency response of microcantilevers are analyzed in viscous fluid environment.In micro scale, the size effect caused by the non-uniformi