单晶石墨烯形成机理的研究-机械工程专业论文.docx

内蒙古科技大学硕士学位论文 内蒙古科技大学硕士学位论文 III III decomposition of CH3, then the final state structure formed with CH, CH2, C2H4 and other smaller CxHy clusters adsorbed on copper surface independently. In addition, C4H5 and C4H6 clusters produced respectively by the combination of CH and symmetrical C3H4 and C3H5 clusters were also studied in this thesis, computing results indicate that, compared with C4H5, The C4H6 cluster have a lower formation energy, a higher symmetry and a more stable structure . On the basis of theoretical research, a preliminary experimental exploration on graphene growth was conducted. Using plasma chemical vapor deposition method under the condition of low pressure, we intend to synthesize single-crystal graphene on copper, with methane as carbon source. Pretreatment can effectively improve the surface roughness of the copper substrate, the specific process is as follows: firstly a copper foil was onicated in 10% diluted hydrochloric acid using an ultrasonic cleaner, and then was Electrochemical-Polished under the applied voltage of 10V for 3min, and finally was High-pressure annealed under a hydrogen atmosphere. Atomic force microscopy images show that, the maximum bulge of such pretreated copper foil was lower than 10.0nm. The thesis designs a complete set of schemes for grephene growth by microwave plasma chemical vapor deposition method. In the follow-up work, we will conduct the single-crystal graphene growth research, with above pretreated copper foil as substrates. Key Words：Single-crystal graphene；CxHy clusters；Formation mechanism；First-Principle； Chemical vapor deposition PAGE PAGE 1 目 录 摘 要 I Abstract II HYPERLINK \l _bookmark0 第 1 章 绪 论 1 HYPERLINK \l _bookmark1 1.1 研究背景 1 HYPERLINK \l _bookmark2 1.2 石墨烯的结构、性质及应用 2 HYPERLINK \l _bookmark3 1.2.1 石墨烯的结构和优异性质 2 HYPERLINK \l _bookmark4 1.2.2 石墨烯的应用 3 HYPERLINK \l _bookmark5 1.3 石墨烯的制备方法 4 HYPERLINK \l _bookmark6 1.4 化学气相沉积石墨烯的研究现状及存在问题 9 HYPERLINK \l _bookmark7 1.4.1 CVD 石墨烯的研究现状